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1 Ergebnisse
1
Moisture Diffusion in Dense SiO2 and Ultra Low k Integrated..:
, In:
2019 IEEE International Integrated Reliability Workshop (IIRW)
,
Cartailler, Vivien
;
Moulard, Jean Baptiste
;
Pin, Marie-Astrid
... - p. 1-5 , 2019
Link:
https://doi.org/10.1109/IIRW47491.2019.8989874
RT T1
2019 IEEE International Integrated Reliability Workshop (IIRW)
: T1
Moisture Diffusion in Dense SiO2 and Ultra Low k Integrated Stacks
UL https://suche.suub.uni-bremen.de/peid=ieee-8989874&Exemplar=1&LAN=DE A1 Cartailler, Vivien A1 Moulard, Jean Baptiste A1 Pin, Marie-Astrid A1 Duchamp, Genevieve A1 Fremont, Helene A1 Imbert, Gregory A1 Guyader, Veronique A1 Juhel, Marc A1 Lamontagne, Patrick A1 Rafik, Mustapha A1 Ney, David A1 Benoit, Daniel A1 Chaton, Catherine YR 2019 SN 2374-8036 K1 Moisture diffusion K1 fully integrated stacks K1 ultra low k K1 PECVD dielectrics K1 electrical characterization K1 Tof-SIMS SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/IIRW47491.2019.8989874 DO https://doi.org/10.1109/IIRW47491.2019.8989874 SF ELIB - SuUB Bremen
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