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1 Ergebnisse
1
Moisture Influence on Reliability and Electrical Characteri..:
, In:
2019 IEEE International Integrated Reliability Workshop (IIRW)
,
Vidal-Dho, Matthias
;
Hubert, Quentin
;
Gonon, Patrice
... - p. 1-4 , 2019
Link:
https://doi.org/10.1109/IIRW47491.2019.8989905
RT T1
2019 IEEE International Integrated Reliability Workshop (IIRW)
: T1
Moisture Influence on Reliability and Electrical Characteristics of SiOC:H Low-k Dielectric Material
UL https://suche.suub.uni-bremen.de/peid=ieee-8989905&Exemplar=1&LAN=DE A1 Vidal-Dho, Matthias A1 Hubert, Quentin A1 Gonon, Patrice A1 Pelissier, Bernard A1 Fornara, Pascal A1 Escales, Jean-Philippe A1 Potard, Pascale A1 Moragues, Jean-Michel A1 Ogier, Jean-Luc YR 2019 SN 2374-8036 K1 low-k dielectrics K1 moisture K1 reliability K1 SiOC:H K1 conduction K1 leakage K1 BEOL K1 TDDB K1 CCS K1 CVS SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/IIRW47491.2019.8989905 DO https://doi.org/10.1109/IIRW47491.2019.8989905 SF ELIB - SuUB Bremen
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