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Demonstration of BEOL-compatible ferroelectric Hf0.5Zr0.5O2..:

, In: 2019 IEEE International Electron Devices Meeting (IEDM),
Francois, T. ; Pellissier, C. ; Slesazeck, S.... - p. 15.7.1-15.7.4 , 2019
Link: https://doi.org/10.1109/IEDM19573.2019.8993485