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Equivalent Oxide Thickness (EOT) Scaling With Hafnium Zirco..:

, In: 2019 IEEE International Electron Devices Meeting (IEDM),
Ni, Kai ; Saha, Atanu ; Chakraborty, Wriddhi... - p. 7.4.1-7.4.4 , 2019
Link: https://doi.org/10.1109/IEDM19573.2019.8993495