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Formation of High Reliability Hydrogen-free MONOS Cells Usi..:

, In: 2019 IEEE International Electron Devices Meeting (IEDM),
Noguchi, Masaki ; Abe, Junko ; Ogawa, Yoshihiro... - p. 30.2.1-30.2.4 , 2019
Link: https://doi.org/10.1109/IEDM19573.2019.8993586