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Vertical Nanowire and Nanosheet FETs: Device Features, Nove..:

, In: 2019 IEEE International Electron Devices Meeting (IEDM),
Veloso, A. ; Hikavyy, A. ; Loo, R.... - p. 11.1.1-11.1.4 , 2019
Link: https://doi.org/10.1109/IEDM19573.2019.8993602