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Enabling Sub-5nm CMOS Technology Scaling Thinner and Taller:

, In: 2019 IEEE International Electron Devices Meeting (IEDM),
Ryckaert, J. ; Na, M. H. ; Weckx, P.... - p. 29.4.1-29.4.4 , 2019
Link: https://doi.org/10.1109/IEDM19573.2019.8993631