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3D-carrier Profiling and Parasitic Resistance Analysis in V..:

, In: 2019 IEEE International Electron Devices Meeting (IEDM),
Eyben, P. ; Machillot, J. ; Kim, M.... - p. 11.3.1-11.3.4 , 2019
Link: https://doi.org/10.1109/IEDM19573.2019.8993636