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Ultra-scaled MOCVD MoS2 MOSFETs with 42nm contact pitch and..:

, In: 2019 IEEE International Electron Devices Meeting (IEDM),
Smets, Quentin ; Groven, Benjamin ; Caymax, Matty... - p. 23.2.1-23.2.4 , 2019
Link: https://doi.org/10.1109/IEDM19573.2019.8993650