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Performance Enhancement of MEMS based Piezoelectric Pressur..:

, In: 2019 IEEE 19th International Conference on Nanotechnology (IEEE-NANO),
Bhargava, Mudit ; Tamboli, Alkausil ; Sivanathan, K. - p. 576-579 , 2019
Link: https://doi.org/10.1109/NANO46743.2019.8993875