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Studying Key Principles for Design and Fabrication of Silic..:

, In: 2019 PhotonIcs & Electromagnetics Research Symposium - Spring (PIERS-Spring),
Bakhvalova, T. ; Belkin, M. E. ; Kovalyuk, V. V.... - p. 745-751 , 2019
Link: https://doi.org/10.1109/PIERS-Spring46901.2019.9017646