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1 Ergebnisse
1
The Design of a High Precision Capacitive Pressure Sensor B..:
, In:
2019 Photonics & Electromagnetics Research Symposium - Fall (PIERS - Fall)
,
Li, Xuejiao
;
Zhao, Libo
;
Han, Xiangguang
... - p. 2965-2971 , 2019
Link:
https://doi.org/10.1109/PIERS-Fall48861.2019.9021338
RT T1 <cTitle>2019 Photonics & Electromagnetics Research Symposium - Fall (PIERS - Fall)</cTitle>: T1 <Title>The Design of a High Precision Capacitive Pressure Sensor Based on Comb Electrode</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9021338&Exemplar=1&LAN=DE A1 Li, Xuejiao A1 Zhao, Libo A1 Han, Xiangguang A1 Yang, Ping A1 Luo, Guoxi A1 Zhu, Nan A1 Li, Zhikang A1 Wang, Songli A1 Yan, Xin A1 Jiang, Zhuangde YR 2019 K1 Electrodes K1 Pressure sensors K1 Strain K1 Capacitance K1 Silicon K1 Simulation K1 Micromechanical devices SP 2965 OP 2971 LK http://dx.doi.org/https://doi.org/10.1109/PIERS-Fall48861.2019.9021338 DO https://doi.org/10.1109/PIERS-Fall48861.2019.9021338 SF ELIB - SuUB Bremen
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