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Piezoelectric Energy Harvester Chip Fabrication and Vacuum ..:

, In: 2019 IEEE 21st Electronics Packaging Technology Conference (EPTC),
Ding, Zhipeng ; Sang, Nguyen Minh ; Beibei, Han. - p. 120-123 , 2019
Link: https://doi.org/10.1109/EPTC47984.2019.9026615