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1 Ergebnisse
1
Piezoelectric Energy Harvester Chip Fabrication and Vacuum ..:
, In:
2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)
,
Ding, Zhipeng
;
Sang, Nguyen Minh
;
Beibei, Han
. - p. 120-123 , 2019
Link:
https://doi.org/10.1109/EPTC47984.2019.9026615
RT T1
2019 IEEE 21st Electronics Packaging Technology Conference (EPTC)
: T1
Piezoelectric Energy Harvester Chip Fabrication and Vacuum Packaging
UL https://suche.suub.uni-bremen.de/peid=ieee-9026615&Exemplar=1&LAN=DE A1 Ding, Zhipeng A1 Sang, Nguyen Minh A1 Beibei, Han A1 Kee, Peter Chang Hyun YR 2019 K1 Elementary particle vacuum K1 Packaging K1 Etching K1 Aluminum nitride K1 III-V semiconductor materials K1 Micromechanical devices K1 Silicon SP 120 OP 123 LK http://dx.doi.org/https://doi.org/10.1109/EPTC47984.2019.9026615 DO https://doi.org/10.1109/EPTC47984.2019.9026615 SF ELIB - SuUB Bremen
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