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Development of a Technological Route for the Silicon Micron..:

, In: 2020 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus),
Chaplygin, Yury A. ; Putrya, Mikhail G. ; Paramonov, V. V.. - p. 2119-2122 , 2020
Link: https://doi.org/10.1109/EIConRus49466.2020.9038950