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UTBOX SOI Structures with High-k Stacks of Hafnia and Alumi..:

, In: 2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS),
Popov, Vladimir ; Ilnitsky, Mikhail ; Miakonkikh, Andrey... - p. 1-4 , 2019
Link: https://doi.org/10.1109/EUROSOI-ULIS45800.2019.9041896