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The effect of a damaged surface layer on the conductivity o..:
, In:
2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
,
Miakonkikh, Andrey
;
Rudenko, Konstantin
;
Rogozhin, Alexander
. - p. 1-4 , 2019
Link:
https://doi.org/10.1109/EUROSOI-ULIS45800.2019.9041909
RT T1 <cTitle>2019 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)</cTitle>: T1 <Title>The effect of a damaged surface layer on the conductivity of Si nanowires made by direct plasma etching on SOI wafer</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9041909&Exemplar=1&LAN=DE A1 Miakonkikh, Andrey A1 Rudenko, Konstantin A1 Rogozhin, Alexander A1 Tatarintsev, Andrey YR 2019 SN 2472-9132 K1 Silicon nanowires K1 Silicon fins K1 low-dimensional structures K1 SOI K1 defects K1 thermal oxidation SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/EUROSOI-ULIS45800.2019.9041909 DO https://doi.org/10.1109/EUROSOI-ULIS45800.2019.9041909 SF ELIB - SuUB Bremen
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