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Fabrication of Capacitive Micromachined Ultrasonic Transduc..:
, In:
2020 17th International Bhurban Conference on Applied Sciences and Technology (IBCAST)
,
Ahmad, Mansoor
;
Asim, Muhammad Omer
;
Bozkurt, Ayhan
- p. 592-595 , 2020
Link:
https://doi.org/10.1109/IBCAST47879.2020.9044585
RT T1 <cTitle>2020 17th International Bhurban Conference on Applied Sciences and Technology (IBCAST)</cTitle>: T1 <Title>Fabrication of Capacitive Micromachined Ultrasonic Transducers for Underwater Applications using Thermocompression Wafer-Bonder</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9044585&Exemplar=1&LAN=DE A1 Ahmad, Mansoor A1 Asim, Muhammad Omer A1 Bozkurt, Ayhan YR 2020 SN 2151-1411 K1 Bonding K1 Surface treatment K1 Wafer bonding K1 Ultrasonic transducers K1 Acoustics K1 Gold K1 Capacitive Micromachined Ultrasonic Transducers (CMUTs) K1 Microelectromechanical Systems (MEMS) K1 Underwater Communication K1 Wafer Bonding K1 Thermocompression SP 592 OP 595 LK http://dx.doi.org/https://doi.org/10.1109/IBCAST47879.2020.9044585 DO https://doi.org/10.1109/IBCAST47879.2020.9044585 SF ELIB - SuUB Bremen
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