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1 Ergebnisse
1
Atomic Layer Etching (ALE) of WSe2 Yielding High Mobility p..:
, In:
2019 Device Research Conference (DRC)
,
Nipane, Ankur
;
Sebastian, Punnu Jose
;
Jung, Younghun
... - p. 231-232 , 2019
Link:
https://doi.org/10.1109/DRC46940.2019.9046402
RT T1
2019 Device Research Conference (DRC)
: T1
Atomic Layer Etching (ALE) of WSe2 Yielding High Mobility p-FETs
UL https://suche.suub.uni-bremen.de/peid=ieee-9046402&Exemplar=1&LAN=DE A1 Nipane, Ankur A1 Sebastian, Punnu Jose A1 Jung, Younghun A1 Choi, Min Sup A1 Borah, Abhinandan A1 Yoo, Won Jong A1 Hone, James A1 Teherani, James T. YR 2019 SN 2640-6853 SP 231 OP 232 LK http://dx.doi.org/https://doi.org/10.1109/DRC46940.2019.9046402 DO https://doi.org/10.1109/DRC46940.2019.9046402 SF ELIB - SuUB Bremen
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