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1 Ergebnisse
1
Resonant PZT MEMS Mirror with Segmented Electrodes:
, In:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
,
Piot, Adrien
;
Pribosek, Jaka
;
Maufay, Jordan
... - p. 517-520 , 2020
Link:
https://doi.org/10.1109/MEMS46641.2020.9056124
RT T1 <cTitle>2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Resonant PZT MEMS Mirror with Segmented Electrodes</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9056124&Exemplar=1&LAN=DE A1 Piot, Adrien A1 Pribosek, Jaka A1 Maufay, Jordan A1 Schicker, Johannes A1 Tortschanoff, Andreas A1 Matloub, Ramin A1 Muralt, Paul A1 Moridi, Mohssen YR 2020 SN 2160-1968 K1 Electrodes K1 Resonant frequency K1 Strain K1 Micromechanical devices K1 Optical device fabrication K1 Micromirrors K1 PZT K1 micromirror K1 1D K1 piezoelectric K1 transduction K1 segmentation K1 electrodes SP 517 OP 520 LK http://dx.doi.org/https://doi.org/10.1109/MEMS46641.2020.9056124 DO https://doi.org/10.1109/MEMS46641.2020.9056124 SF ELIB - SuUB Bremen
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