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Environmental Sensing Hub on Single Chip Using Double-Side ..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Chang, Cheng-Chun ; Hong, Ping-Hsiu ; Yeh, Sheng-Kai... - p. 877-880 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056143