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Implementation of Piezoelectric MEMS Microphone for Sensiti..:
, In:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
,
Tseng, Shih-Hsiung
;
Lo, Sung-Cheng
;
Chen, Yu-Chen
... - p. 845-848 , 2020
Link:
https://doi.org/10.1109/MEMS46641.2020.9056150
RT T1 <cTitle>2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Implementation of Piezoelectric MEMS Microphone for Sensitivity and Sensing Range Enhancement</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9056150&Exemplar=1&LAN=DE A1 Tseng, Shih-Hsiung A1 Lo, Sung-Cheng A1 Chen, Yu-Chen A1 Lee, Ya-Chu A1 Wu, Mingching A1 Fang, Weileun YR 2020 SN 2160-1968 K1 Piezoelectric K1 acoustics K1 microphone K1 PZT K1 sensing range K1 cantilever diaphragm SP 845 OP 848 LK http://dx.doi.org/https://doi.org/10.1109/MEMS46641.2020.9056150 DO https://doi.org/10.1109/MEMS46641.2020.9056150 SF ELIB - SuUB Bremen
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