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Ultra-Sensitive Strain Sensor Using High Density Self-Align..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Chung, Myung-Kun ; Yoo, Jae-Young ; Lee, Jae-Shin... - p. 20-23 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056161