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Fabrication of Al-Based Superconducting High-Aspect Ratio T..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Alfaro-Barrantes, Juan A. ; Mastrangeli, Massimo ; Thoen, David J.... - p. 932-935 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056165