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Self-Cleaning Device Using SAW Actuation:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Song, Hyeonseok ; Lee, Jeongmin ; Lee, Kang Yong. - p. 521-522 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056170