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1 Ergebnisse
1
Vertically Integrated Double-Bridge Design for CMOS-MEMS Tr..:
, In:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
,
Lee, Jia-Horng
;
Yeh, Sheng-Kai
;
Fang, Weileun
- p. 693-696 , 2020
Link:
https://doi.org/10.1109/MEMS46641.2020.9056191
RT T1 <cTitle>2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>Vertically Integrated Double-Bridge Design for CMOS-MEMS Tri-Axial Piezo-Resistive Force Sensor</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9056191&Exemplar=1&LAN=DE A1 Lee, Jia-Horng A1 Yeh, Sheng-Kai A1 Fang, Weileun YR 2020 SN 2160-1968 SP 693 OP 696 LK http://dx.doi.org/https://doi.org/10.1109/MEMS46641.2020.9056191 DO https://doi.org/10.1109/MEMS46641.2020.9056191 SF ELIB - SuUB Bremen
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