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A Flow-Type Nanoparticle Generation System Using a Microcha..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Fujimoto, Nozomu ; Kanda, Takefumi ; Omori, Kentaro... - p. 1075-1078 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056205