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Epitaxial Single-Crystal ScAlN on 4H-SiC for High-Velocity,..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Gokhale, Vikrant J. ; Downey, Brian P. ; Hardy, Matthew T.... - p. 1262-1265 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056271