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Flexible ZnO Thin Film Surface Acoustic Wave Device for Flo..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Zhang, Qian ; Wang, Yong ; Tao, Ran... - p. 638-641 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056283