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A 53.36pF/MPA CMOS-MEMS Pressure Sensor with Compact Size a..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Yang, Jyun-Jie ; Tsai, Gordon ; Tsai, Tsung-Heng - p. 661-664 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056292