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Enhanced Piezoelectric $\mathrm{AL}_{1-\mathrm{X}}\mathrm{S..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Bogner, Andreas ; Bauder, Ruediger ; Timme, Hans-Joerg... - p. 1258-1261 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056296