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Thermal Stability of DETF MEMS Resonators: Numerical Modell..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Zega, Valentina ; Opreni, Andrea ; Mussi, Giorgio... - p. 1207-1210 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056338