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Soft and Flexible 3D-Structured Device with Crack-Free Meta..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Moon, Hyunmin ; Kim, Sohee - p. 245-248 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056341