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Suspended Alumina Membrane for GA2O3 Gas Sensor with Enhanc..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Jeong, Han-Il ; Choi, Gyujun ; Kim, Jongbaeg - p. 729-732 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056354