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Impact of X-Ray Radiation on GaN/AlN MEMS Structure and GaN..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Lin, Ji-Tzuoh ; Wang, Peng ; Shuvra, Pranoy... - p. 968-971 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056389