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A Hermetically-Sealed 2.9MHz $\mathrm{N}=3$ Disk BAW Gyrosc..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Wen, Haoran ; Daruwalla, Anosh ; Liu, Chang-Shun. - p. 741-744 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056407