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1 Ergebnisse
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A Hermetically-Sealed 2.9MHz $\mathrm{N}=3$ Disk BAW Gyrosc..:
, In:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
,
Wen, Haoran
;
Daruwalla, Anosh
;
Liu, Chang-Shun
. - p. 741-744 , 2020
Link:
https://doi.org/10.1109/MEMS46641.2020.9056407
RT T1
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
: T1
A Hermetically-Sealed 2.9MHz $\mathrm{N}=3$ Disk BAW Gyroscope with Sub-Degree-Per-Hour Bias Instability
UL https://suche.suub.uni-bremen.de/peid=ieee-9056407&Exemplar=1&LAN=DE A1 Wen, Haoran A1 Daruwalla, Anosh A1 Liu, Chang-Shun A1 Ayazi, Farrokh YR 2020 SN 2160-1968 K1 BAW gyroscope K1 MEMS gyroscope K1 resonator SP 741 OP 744 LK http://dx.doi.org/https://doi.org/10.1109/MEMS46641.2020.9056407 DO https://doi.org/10.1109/MEMS46641.2020.9056407 SF ELIB - SuUB Bremen
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