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Sub-µW Operation and Noise Reduction of Monolithic 3-Axis A..:

, In: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS),
Kurui, Yoshihiko ; Tomizawa, Hideyuki ; Saito, Tomohiro... - p. 785-790 , 2020
Link: https://doi.org/10.1109/MEMS46641.2020.9056408