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1
A High Dynamic Range AFM Probe with Collocated Piezoelectri..:
, In:
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
,
Mahdavi, Mohammad
;
Coskun, M. Bulut
;
Nasrabadi, Hazhir Mahmoodi
. - p. 50-53 , 2020
Link:
https://doi.org/10.1109/MEMS46641.2020.9056447
RT T1 <cTitle>2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)</cTitle>: T1 <Title>A High Dynamic Range AFM Probe with Collocated Piezoelectric Transducer Pairs</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9056447&Exemplar=1&LAN=DE A1 Mahdavi, Mohammad A1 Coskun, M. Bulut A1 Nasrabadi, Hazhir Mahmoodi A1 Moheimani, S. O. Reza YR 2020 SN 2160-1968 K1 Atomic force microscopy (AFM) K1 tapping mode K1 active microcantilever K1 piezoelectric transducer K1 dynamic range K1 feedthrough SP 50 OP 53 LK http://dx.doi.org/https://doi.org/10.1109/MEMS46641.2020.9056447 DO https://doi.org/10.1109/MEMS46641.2020.9056447 SF ELIB - SuUB Bremen
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