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Thin Piezoelectric Films for Micromechanical Systems:

, In: 2020 Moscow Workshop on Electronic and Networking Technologies (MWENT),
Gurin, Sergey A. ; Pecherskaya, Ekaterina A. ; Spitsyna, Kseniya Yu.... - p. 1-5 , 2020
Link: https://doi.org/10.1109/MWENT47943.2020.9067450