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Micromachining results using industrial fluorine lasers at ..:

, In: Conference on Lasers and Electro-Optics (CLEO 2000). Technical Digest. Postconference Edition. TOPS Vol.39 (IEEE Cat. No.00CH37088),
Scaggs, M. ; Mayer, E. ; Fair, J.. - p. 579,580 , 2000
Link: https://doi.org/10.1109/CLEO.2000.907416