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Aluminum nitride based piezoelectric harvesters:

, In: 2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS),
Gablech, I. ; Klempa, J. ; Pekarek, J.... - p. 1-4 , 2019
Link: https://doi.org/10.1109/PowerMEMS49317.2019.8206321136