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A Monolithic Tri-axis MEMS Gyroscope Operating in Air:

, In: 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),
Tseng, Kuan-Ju ; Li, Ming-Huang ; Li, Sheng-Shian - p. 1-3 , 2020
Link: https://doi.org/10.1109/INERTIAL48129.2020.9090013