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1 Ergebnisse
1
Chipping and wearing in MEMS inertial sensors: effects on s..:
, In:
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
,
Pagani, Leonardo Gaffuri
;
Guerinoni, Luca
;
Falorni, Luca
... - p. 1-4 , 2020
Link:
https://doi.org/10.1109/INERTIAL48129.2020.9090056
RT T1 <cTitle>2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)</cTitle>: T1 <Title>Chipping and wearing in MEMS inertial sensors: effects on stability and predictive analysis through test structures</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9090056&Exemplar=1&LAN=DE A1 Pagani, Leonardo Gaffuri A1 Guerinoni, Luca A1 Falorni, Luca A1 Gattere, Gabriele A1 Mogavero, Giovanni A1 Ghisi, Aldo A1 Langfelder, Giacomo YR 2020 K1 Friction K1 Sensors K1 Micromechanical devices K1 Oscillators K1 Stability analysis K1 Thermal stability K1 Q-factor K1 MEMS K1 stability K1 reliability K1 chipping K1 wearing SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/INERTIAL48129.2020.9090056 DO https://doi.org/10.1109/INERTIAL48129.2020.9090056 SF ELIB - SuUB Bremen
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