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High Q-Factor Mode-Matched Silicon Gyroscope with a Ladder ..:

, In: 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),
Goto, Katsuaki ; Harada, Shota ; Hata, Yoshiyuki... - p. 1-4 , 2020
Link: https://doi.org/10.1109/INERTIAL48129.2020.9090067