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Drop-in test structure chip to visualize residual stress of..:

, In: 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS),
Usami, Naoto ; Ota, Etsuko ; Higo, Akio.. - p. 1-4 , 2020
Link: https://doi.org/10.1109/ICMTS48187.2020.9107904