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Automated Generation, Fabrication and Measurement of Parame..:

, In: 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS),
Sullivan, P. ; Tsiamis, A. ; Ronde, M.... - p. 1-6 , 2020
Link: https://doi.org/10.1109/ICMTS48187.2020.9107929