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The Investigation of Material Modification for SiO2, Si3N4 ..:

, In: 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM),
Wada, R. ; Kai, H. ; Kawakami, N... - p. 1-4 , 2020
Link: https://doi.org/10.1109/EDTM47692.2020.9117807