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Patterning Platinum by Selective Wet Etching of Sacrificial..:

, In: 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM),
Meier, S. ; Rinck, H. ; Lange, B.... - p. 1-4 , 2020
Link: https://doi.org/10.1109/EDTM47692.2020.9117886