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1 Ergebnisse
1
Process Optimization for Improving the Threshold Voltage Di..:
, In:
2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Wang, Yaohua
;
Pu, Kui
;
Zeng, Jun
... - p. 1-4 , 2020
Link:
https://doi.org/10.1109/EDTM47692.2020.9117906
RT T1
2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
: T1
Process Optimization for Improving the Threshold Voltage Distribution of 3300V IGBT Platform
UL https://suche.suub.uni-bremen.de/peid=ieee-9117906&Exemplar=1&LAN=DE A1 Wang, Yaohua A1 Pu, Kui A1 Zeng, Jun A1 Jin, Rui A1 Zhang, Wenhong A1 Xu, Longlai A1 Darwish, Mohamed N. A1 Dong, Shaohua YR 2020 K1 IGBT K1 Threshold Voltage K1 Distribution K1 P+ Spacer Implant K1 Out-diffusion SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/EDTM47692.2020.9117906 DO https://doi.org/10.1109/EDTM47692.2020.9117906 SF ELIB - SuUB Bremen
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