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BEoL Reliability, XPS and REELS Study on low-k Dielectrics ..:

, In: 2020 IEEE International Reliability Physics Symposium (IRPS),
Wehring, B. ; Hoffmann, R. ; Gerlich, L.... - p. 1-5 , 2020
Link: https://doi.org/10.1109/IRPS45951.2020.9129285