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1 Ergebnisse
1
Ferroelectric Tunnel Junction Optimization by Plasma-Enhanc..:
, In:
2020 IEEE Silicon Nanoelectronics Workshop (SNW)
,
Hur, Jae
;
Luo, Yuan-Chun
;
Wang, Panni
... - p. 11-12 , 2020
Link:
https://doi.org/10.1109/SNW50361.2020.9131649
RT T1 <cTitle>2020 IEEE Silicon Nanoelectronics Workshop (SNW)</cTitle>: T1 <Title>Ferroelectric Tunnel Junction Optimization by Plasma-Enhanced Atomic Layer Deposition</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9131649&Exemplar=1&LAN=DE A1 Hur, Jae A1 Luo, Yuan-Chun A1 Wang, Panni A1 Tasneem, Nujhat A1 Khan, Asif Islam A1 Yu, Shimeng YR 2020 SN 2161-4644 SP 11 OP 12 LK http://dx.doi.org/https://doi.org/10.1109/SNW50361.2020.9131649 DO https://doi.org/10.1109/SNW50361.2020.9131649 SF ELIB - SuUB Bremen
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